MEMS Comb Drive Actuator

Nanotechnology

How It Works

A MEMS electrostatic comb drive actuator consists of two interdigitated conductive finger arrays: one fixed to the substrate and one suspended by flexible folded flexures. Applying a voltage creates electrostatic fringe fields that generate a stable attractive lateral actuation force proportional to the square of voltage and independent of position.

Governing Equation
F_e = n · ε_0 · h / g · V^2